JPH0317622U - - Google Patents
Info
- Publication number
- JPH0317622U JPH0317622U JP7812689U JP7812689U JPH0317622U JP H0317622 U JPH0317622 U JP H0317622U JP 7812689 U JP7812689 U JP 7812689U JP 7812689 U JP7812689 U JP 7812689U JP H0317622 U JPH0317622 U JP H0317622U
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- wafer
- exposure device
- section
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7812689U JPH0317622U (en]) | 1989-06-30 | 1989-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7812689U JPH0317622U (en]) | 1989-06-30 | 1989-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317622U true JPH0317622U (en]) | 1991-02-21 |
Family
ID=31621121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7812689U Pending JPH0317622U (en]) | 1989-06-30 | 1989-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317622U (en]) |
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1989
- 1989-06-30 JP JP7812689U patent/JPH0317622U/ja active Pending